Spin on Dielectrics in Silicon technology

OVERVIEW

Spin-on Dielectrics or AZ® Spinfil® SOD Series is a Poly (perhydrosilazane) - (SiH2NH) based inorganic SOD material designed by AZ Electronic Materials to be used for gapfilling and in planarization applications in advanced device manufacturing. AZ® Spinfil® SOD Series can be converted to SiO2 based film which has similar properties to high performance CVD.

AZ® Spinfil® SOD Series is the industry-standard material and is used as the dielectric technology for FEOL gapfilling applications in advanced device manufacturing.
FEATURES & BENEFITS
- Excellent Cost of Ownership with extremely high output
- No limitation confirmed down to 10nm gap
- Inorganic polymer based – purest silica

Product	Detail
Spinfil 100	partially organic group modified silazane polymer based product with catalyst to enable low temperature SiO2 conversion, suggested applications are IMD, Sacrificial layer.
Spinfil 200	partially organic group modified silazane polymer based product without any catalyst, suggested applications are PMD, IMD.
Spinfil 400	complete inorganic silazane polymer based product without any catalyst, suggested applications are STI, PMD
Spinfil 600	complete inorganic silazane polymer based product without any catalyst, modified from Spinfil 400 for improved coating defectivity, suggested applications are STI, PMD

RELATED PRODUCTS
AZ also provides ancillary chemicals exclusive for AZ® Spinfil® SOD Series.
- SOD EBR
- SOD Thinner (for chemical line cleaning/ purging)
INDUSTRIES
AZ's SOD EBRs are used by a number of industries to manufacture many types of devices, including:
- Flash memory
- DRAM
- Logic such as microprocessors
GOOD TO KNOW

Advise on safety handling:

Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.

Storage conditions

Requires special handling for waste; please ask your AZ Account Manager for more handling and storage information.

Shelf life

Typically 6 months shelf life (0~10 °C storage conditions)

Package types

Available in quart and 2.4-liter glass bottles

Let us know how we can help

1-908-295-0324