Spin on Dielectrics Thinner in Silicon technology

OVERVIEW

AZ Polysilazane Thinner 400 is a specially designed solvent for cleaning of chemical lines in equipment where AZ® Spinfil® SOD Series is used. The basic chemical is identical to the carrier solvent of AZ® Spinfil® SOD Series (dibutylether).

AZ Polysilazane Thinner 400 is the only solvent that is recommended for use with AZ® Spinfil® SOD Series to prevent any chemical interactions or unexpected contamination.
FEATURES & BENEFITS
- Highly controlled (purified and filtered) solvent identical to the AZ® Spinfil® SOD Series
- No contamination/residuals even when remaining for some period in process equipment chemical lines
- When equipment is idle, Thinner400 can be used for continuous dummy dispense to save cost
PRODUCT LIST

AZ Polysilazane Thinner 400; Compatible solvent in chemical line with AZ® Spinfil® SOD Series
RELATED PRODUCTS
AZ also provides the spin-on dielectric material and complimentary processing aides:
- Spinfil® SOD Series Dielectric
- SOD EBR for edge-bead removal and solvent rinse
INDUSTRIES
AZ's Spin-on Dielectrics are used by a number of industries to manufacture many types of devices, including:
- Flash memory
- DRAM
- Logic such as microprocessors
GOOD TO KNOW

Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.

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