• OVERVIEW

    AZ's SOD EBR solvents are specially designed to maximize AZ® Spinfil® SOD Series performance with lower cost of ownership.

    AZ HC-100 is the common solvent for rinse, cleaning and EBR with excellent solubility for AZ® Spinfil® SOD Series and stability of waste by its hydrophobicity.

    AZ Rinse 500 is as exclusive solvent for EBR to minimize the edge excursion by precisely controlled solubility of AZ® Spinfil® SOD Series.

  • FEATURES & BENEFITS
    • Excellent cost of ownership
    • Perfect process compatibility with AZ® Spinfil® SOD Series
    • Quick drying out to secure short tact time
    • Dies/wafer improvement by minimal edge excursion (Rinse500)
  • PRODUCT LIST

    Product

    Details

    AZ HC-100 Rinse, cleaning, EBR for AZ® Spinfil® SOD Series
    AZ Rinse 500 EBR for AZ® Spinfil® SOD Series
  • RELATED PRODUCTS

    AZ also provides the spin-on dielectric material and complimentary processing aides:

    • Spinfil® SOD Series Dielectric
    • SOD Thinner (for chemical line cleaning/ purging)

  • INDUSTRIES

    AZ's SOD EBRs are used by a number of industries to manufacture many types of devices, including:

    • Flash memory
    • DRAM
    • Logic such as microprocessors
  • GOOD TO KNOW

    Advise on safety handling:

    Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.

    Keep away from heat and flame. Avoid breathing vapors and contact with skin, eyes, and clothing. Use only with adequate ventilation and proper protective eyewear, gloves, and clothing. Wash thoroughly after handling. Keep container closed.

    Storage conditions

    Store in original container. Transport and store under dry conditions tightly closed. May liberate combustible solvent vapors. Store under cool and dry conditions.

    Shelf life

    Typically 12 months shelf life

    Package types

    Several package sizes are available including gallon glass bottle, 18-liter canisters, and 200-liter drums; several local-production sources are available for HC-100, while Rinse 500 is manufactured in Japan.

CONTACT US

Let us know how we can help

Speak to Elaine Kokinda on

1-908-295-0324