Klebosol CMP slurry

The Klebosol products cover a large range of pH to answer different application needs in CMP:

• Basic - ammonium or potassium stabilised
• Neutral - neutral pH slurry which can be used in specific CMP applications such as polysilicon
• Acidic - acidic slurry destined to specific CMP applications such as direct STI or metal planarisation

Product development for customised applications is always possible.

• Oxide - ILD, STI, Direct STI
• Polysilicon
• Post tungsten
• Metal - Cu, Barrier
• Others - High-K

For CMP application, Klebosol is globally and exclusively supplied via a strategic alliance with Dow Electronic Materials, Semiconductor Technologies.

This alliance brings significant benefits to our customers by combining our R&D, technology and manufacturing expertise with Dow’s application capabilities, global market and service channels. It also enables us to offer customised formulations of Klebosol via an accelerated R&D path that ensures the formulation is tailored to the customer's requirements.

Please click here to visit the Klebosol page on the Dow website for more information.

Electrolytes

Electrolytes have the potential to destabilise Klebosol and accelerate the gelling process. When Klebosol is left unpackaged, its alkaline nature is conducive to the absorption of CO2 from the air.

CO2 absorption will form sodium carbonate, which will destabilise the suspension. Therefore, it is highly recommended that the drums are promptly closed after use to preserve any unused product.

Bacteria

Klebosol suspensions may be conducive to bacterial growth. This can be avoided by the addition of a biocide compatible with the application for which Klebosol will be used.

Surfactants & Solvents

Klebosol is compatible with most anionic and non-ionic surfactants, as well as organic solvents.

Cationic surfactants, such as quaternary ammonium salts, have a destabilising effect and are therefore NOT recommended.

We highly recommend that preliminary testing be performed before formulating Klebosol with a surfactant or solvent.

Temperature

Klebosol freezes below 0°C, at which point destabilisation and gelling of the suspension will occur. Thawing the product will not restore its colloidal properties.

At high temperatures, a loss of water due to evaporation will increase Klebosol’s solid content and potentially result in gelling.

Storage

With the exception of select grades, Klebosol's shelf life is at least one year without any change in specific properties, if kept in its original unopened packaging at a temperature above 0°C.

At standard solid content and particle size, Klebosol's shelf life is greater than one year. Extensive ageing tests have confirmed that each relevant parameter remains constant, provided there is neither evaporation nor freezing.An increase in silica content shortens the average distance between the particles, and the tendency to destabilise intensifies. Conversely, dilution will increase the mean distance and improve stability.

Dilution of Klebosol with water is possible in all proportions.

Safety

Please contact us for the safety data sheet.

Packaging

Packaging of Klebosol varies depending on the location of production. They are as follows:

Two Manufacturing Facilities

Klebosol is manufactured at two locations: Lamotte, France and Martin, South Carolina, USA. Both locations are ISO 9001 certified.

Working with Customers

If you have a manufacturing challenge and/or require a custom formulation, the Klebosol Research Department is happy to work with you to solve your problem.