High purity Solvents in Litho technology

OVERVIEW

AZ offers a number of high-purity solvents and solvent blends, used as processing aids in a variety of applications.

Among these are a suite of Polyimide Solvents, used in the processing of photosensitive Polyimides, and other electronic-grade organic solvents.
FEATURES & BENEFITS
- Low metals, particles specifications
  suitable for the most advanced processes
- Variety of packages available
  fits with most delivery systems including central distribution

Polyimide Solvents	Detail
A-515 Developer	cyclopentanone-based
A-330 Developer	cyclohexanone-based blend
A-430 Developer	clyclopentanone/cyclohexanone blend
C-260 Rinse	PGMEA-based
C-265 Rinse	PGME/PGMEA mixture

Other Solvents	Detail
NMP	electronic-grade n-Methyl-2-pyrrolidone

RELATED PRODUCTS

High-purity Solvents are used in conjunction with the appropriate Photoresist or Polyimide designed for the targeted feature size and lithography exposure system.
INDUSTRIES
High-purity Solvents are used by the various industries to manufacture many types of devices, including:
- Flat Panel Displays
- DRAM
- NAND flash memory
- Logic such as microprocessors
- MEMS such as recording heads for magnetic HDD storage
GOOD TO KNOW
Advise on safety handling:

Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.

Storage conditions
- Keep sealed in original container
- Avoidfreezing and direct sunlight
- Productshould be stored above 32°F (0°C)
- Empty containers may contain harmful residue
Shelf life

Typically 18 months; Specifications are subject to revision. Contact your AZ account manager for additional information.

Package types

AZCompatibility with materials of construction varies with the type of solvent; package types vary accordingly but typically both small volume and drum-type packages are available.

Let us know how we can help

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