• OVERVIEW

    AZ offers a number of high-purity solvents and solvent blends, used as processing aids in a variety of applications.

    Among these are a suite of Edge Bead Removers (EBRs), used to remove residual photoresist from substrate surfaces after coating as well as assist in tool cleaning steps such as coater cup rinsing. EBRs also are used to dilute photoresist formulations to lower viscosity.

  • FEATURES & BENEFITS
    • Industry-accepted solvents
      PGMEA based, meets all regulatory and environmental requirements
    • Industry leader for pre-wet applications
      allows for more uniform coating of photoresist
  • PRODUCT LIST

    Product

    Detail

    EBR 70/30 PGME/PGMEA blend, suitable for most applications
    EBR 8020 PGME/PGMEA blend
    EBR Solvent electronic-grade PGMEA
    5200 Thinner electronic-grade PGMEA
    EBRB 50/50 PGME/PGMEA/n-Butyl Acetate blend
    EBR 100 blend of 1-Methoxy-2-propanol, 2-Propanol and 1-Methoxy-2-propanol acetate
    EBR 200 electronic-grade cyclopentanone
    EBR 300 electronic-grade cyclohexanone
  • RELATED PRODUCTS

    EBRs are used in conjunction with the appropriate Photoresist designed for the targeted feature size and lithography exposure system.

  • INDUSTRIES

    Photoresist EBRs are used by the various industries to manufacture many types of devices, including:

    • Flat Panel Displays
    • Flash memory
    • Discrete and power
    • DRAM
    • CCD image sensors
    • Microprocessors
    • Hard disc drives
    • LED
  • GOOD TO KNOW

    Advise on safety handling:

    Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.

    • Use only with adequate ventilation and proper protective eyewear, gloves, and clothing.
    • Avoid breathing vapors and contact with skin, eyes, and clothing.
    • Keep container closed.
    • Wash thoroughly after handling.

    Storage conditions

    • Keep container tightly closed and dry in a cool, well-ventilated place
    • Store at appropriate temperature. See label for details.
    • Store in original container.
    • Transport and store under dry conditions tightly closed and protected from heat and light.
    • May liberate flammable solvent vapors.

    Shelf life

    One year

    Package types

    1, 4, 18, 19, 20, 180, 190, 200, 6000L package.
    Consult your AZ Account Manager for details on package availability

CONTACT US

Let us know how we can help

Speak to Elaine Kokinda on

1-908-295-0324