• OVERVIEW

    AZ's chemical shrink coatings (RELACs) are water based polymer products that are used to shrink openings defined by the photoresist pattern.

    This product enables defined features to be shrunk by up to 60nm with existing lithography equipment. Therefore, with this product, 248nm or 193-dry technology can be extended to substantially lower feature sizes without investing in new scanner technology

  • FEATURES & BENEFITS
    • Capable of reducing feature size of C/H and trenches imaged with 193nm process by 10 - 40 nm
      delay moving layers to next-node lithography tools (immersion or EUV)
    • Shrink mechanism based on coat + bake + rinse
      excellent cost-of-ownership with process based entirely in lithography module
    • PFOx-free components
      meet all regulatory requirements and initiatives
  • PRODUCT LIST
    • R607
      for 248nm and 193nm exposure-based feature sizes and specific photoresist types, using dionized water rinse.
    • SH-114
      for 193nm exposure-based feature sizes, using deionized water rinse.
  • RELATED PRODUCTS

    Chemical shrink coatings are used in conjunction with the appropriate Photoresist designed for the targeted feature size and lithography exposure system

  • INDUSTRIES

    Chemical shrink technology is applicable where C/H and trench feature sizes are design-limiting, particularly in manufacturing memory devices cell arrays are critical.

    • Flash memory
    • DRAM
  • GOOD TO KNOW

    Advise on safety handling:

    Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling

    Storage conditions

    • Store tightly closed container in a well ventilated area.
    • Do not store or transport below 0°C. See label for details.
    • Keep from freezing.
    • Transport and store under dry conditions tightly closed.
    • Store in original container.

    Shelf life

    Chemical shrink products typically have at least a six-month shelf life under recommended storage conditions

    Package types

    Available in gallon bottle, and 4-Liter and 10-Liter "bag-in-bottle" type

CONTACT US

Let us know how we can help

Speak to Elaine Kokinda on

1-908-295-0324