• OVERVIEW

    Anti-reflective coatings

    Anti-reflective coatings are used in the lithography process to improve the photoresist profile and reduce the line width variation caused by scattering and reflecting light.

    BARCs

    BARCs are spin-on organic polymer formulations. These products are designed for specific lithographic wavelength processes including i-Line, 248nm, 193nm and 193nm immersion. They are coated on the wafer before the photoresist and must be performance-compatible with the photoresist.

    TARCs

    TARCs are water soluble polymers applied as a layer above the photoresist to reduce reflection of light during exposure, resulting in improved line width control. They can also be used as a protective coating to reduce photoresist poisoning/outgassing/defects.

  • FEATURES & BENEFITS

    BARCs

    • Specifically-designed refractive indices for exposure system
      ensures minimum reflectivity and maximum swing suppression
    • Formulated in photoresist-compatible solvent systems
      improved process windows, excellent coating uniformity, simplified EBR
    • Broad spectrum of available polymer components
      optimised performance including etch selectivity, via filling properties, minimal outgassing

    TARCs

    • Broadly-applicable material platform
      suitable for all exposure wavelengths and nearly all photoresists
    • Unique polymer
      provides only PFOx/telomer-free formulation to meet regulatory requirements
    • Water-based formulation
      removed during standard photoresist develop step
  • PRODUCT LIST

    BARC

    Detail
    BARLi ® BARCs for use with i-Line photoresists
    HERB (TM) high etch rate BARCs for use with i-Line photoresists
    KrF-series DUV BARCs for use with 248nm photoresists
    ArF-series 193nm BARCs for use with "dry" and immersion photoresists
    EB-series 193nm BARCs for use with "dry" and immersion photoresists

    TARCs

    Detail
    Aquatar ® series TARCs for use in i-Line, 248nm and 193nm lithography processes
  • RELATED PRODUCTS

    Anti-reflective coatings are used in conjunction with the appropriate Photoresist designed for the targeted feature size and lithography exposure system

  • INDUSTRIES

    Anti-reflective coatings are used by the IC industry to manufacture many types of devices, including:

    • Flash memory
    • Discrete and power
    • DRAM
    • CCD image sensors
    • Microprocessors
    • Hard disc drives
  • GOOD TO KNOW

    Advise on safety handling:

    Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.

    Storage conditions

    • Keep away from heat and flame.
    • Avoid breathing vapors and contact with skin, eyes, and clothing.
    • Use only with adequate ventilation and proper protective eyewear, gloves, and clothing.
    • Wash thoroughly after handling.
    • Keep container closed.
    • Transport and store under dry conditions tightly closed.
    • May liberate combustible solvent vapors.
    • Store under cool and dry conditions. See label for details.
    • Store in original container.

    BARCS

    Keep sealed in original container. Store between 41 - 77ºF (5 - 25ºC). Empty container may contain harmful residue.

    TARCs

    Keep sealed in original container. Avoid freezing and direct sunlight. Product should be stored > 32 F (0ºC). Empty container may contain harmful residue.

    Shelf life

    BARC products typically have at least a six-month shelf life under recommended storage conditions.

    TARC products typically have a shelf life of 12 months under recommended storage conditions.

    Package types

    Available in gallon bottle, and 4-Liter and 10-Liter "bag-in-bottle" type

CONTACT US

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Speak to Elaine Kokinda on

1-908-295-0324