• OVERVIEW

    AZ® Adhesion Promoter is highly purified hexamethyldisilazane (HMDS), which is a clear colorless liquid with a characteristic ammonia-like odor. HMDS is widely used to promote adhesion of photoresist to semiconductor wafers and other substrates.

    HMDS is typically applied onto wafers by the vapor prime method. The process is performed by injecting liquid HMDS into VPU, which converts the material into vapor. The volume and temperature applied determine contact angle.

  • FEATURES & BENEFITS

    AZ Adhesion Promoter improves the process yield in wet processes by improving the adhesion properties of photoresists on substrate.

  • PRODUCT LIST

    AZ AD PROMOTOR - Composed of 1,1,1,3,3,3-hexamethyldisilazane(HMDS).

    NOTE: this product is not available in all Regions; please contact your AZ Account Manager for details.

  • RELATED PRODUCTS

    Adhesion promoters are used in conjunction with the appropriate Photoresist designed for the targeted feature size and lithography exposure system.

  • INDUSTRIES

    Adhesion promoters are used by the various industries to manufacture many types of devices, including:

    • Flat Panel Displays
    • DRAM
    • NAND flash memory
    • Logic such as microprocessors
    • MEMS such as recording heads for magnetic HDD storage
  • GOOD TO KNOW

    Advise on safety handling:

    Refer to the current Material Safety Data Sheet (MSDS) and product label for detailed information prior to handling.

    WARNING! Flammable and corrosive liquid and vapor. Keep away from heat, sparks, and open flame. Ground all equipment and drums during transfer operations. This material will build up static charges. Avoid contact with eyes, skin, and clothing. Vapor and liquid react with atmospheric moisture and water to form ammonia.

    • Wash thoroughly after handling.
    • Keep containers tightly closed
    • Avoid breathing vapors and contact with skin, eyes, and clothing.
    • Use only with adequate ventilation and proper protective eyewear, gloves, and clothing.

    Storage conditions

    • Store at appropriate temperature. See label for details.
    • Store in original container.
    • Transport and store under dry conditions tightly closed.
    • May liberate flammable solvent vapors

    Shelf life

    One year

    Package types

    AZ® AD Promoter is compatible with most commercially available wafer processing equipment. Recommended materials of construction include stainless steel, PTFE, polypropylene, and high density polyethylene.

    4L, 10L, 18L
    (Base on product line and would be discussion)

CONTACT US

Let us know how we can help

Speak to Elaine Kokinda on

1-908-295-0324